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Light Contact Vaporizer VU-900 series

It reduces the chances of liquid contacting the walls of the vaporizer, allowing for efficient vaporization.

This is a vaporizer suitable for the vaporization of easily thermally decomposable liquids such as high-k materials and various metals. 【Features】 ○ The liquid has minimal contact with the walls of the vaporizer (made of metal), allowing for efficient vaporization with light contact. ○ High-efficiency vaporization achieved through atomization of droplets and fine particle generation by blow gas. ○ When combined with the liquid mass flow meter LM-3000L series, it allows for precise flow control of liquid materials and efficient vaporization (US PAT.5372754). ○ A vaporizer that vaporizes easily thermally decomposable liquids at low temperatures. *For other functions and details, please download the catalog.